The X-BOT-120 is the largest of Micronix’s miniature “hexapod-like” series, offering precision positioning in six degrees of freedom with nanometer resolution. Its parallel kinematics design leverages Micronix’s patented piezo stick-slip motors, delivering large motion ranges within a compact footprint.
INDUSTRIES
Photonics and optical alignment
Wafer handling and probe station
Microscopy and imaging
R&D tooling and sampling
Metrology and calibration equipment
Aerospace and vacuum instrumentation
KEY FEATURES
Travel: ±6 x ±6 x +3.5/-6 xyz, +7/-9° x ±9° x ±6°
Load capacity up to 500g
33mm Aperture diameter
Optional PR-32L Rotational Stage
Crossed roller bearings
70 mm height at center position
Absolute encoders, closed loop feedback
HV, UHV, non-magnetic versions
INTEGTATION
The X-BOT-120 comes with a compatible MMC-110 controller and the HexaSoft™ Software Suite, providing a complete platform for high-precision positioning. Calibration files are included, and the software supports user-defined coordinate frames for flexible integration. Users can control the platform in absolute or relative positions and orientations, either in the user-defined frame or relative to an object on the platform, making it ideal for alignment, precision positioning, and complex motion tasks.
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